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First light for EDET prototypes at TEM

First results of novel electron detectors for TEM imaging

11/26/2020

EDET DH80K is a novel focal plane instrument for transmission electron microscopy, which is done by the HLL in collaboration with the Max-Planck-Institute for structure and dynamics of matter in Hamburg. It is used for direct electron imaging in the focal plane of transmission electron microscope. Key features of this system are the fast imaging rate of 80 kHz, i.e. 13 µs per frame, for a 1024 x 1024 pixel sensor with 60 x 60 µm2 pixels, allowing for large-area imaging with a time resolution unprecedented at a TEM system. In addition, the system adopts innovative technologies like SOI based detector material and thinning to improve spatial resolution or nonlinear pixel characteristics to boost the systems dynamic range.

Now, a small-area prototype sensor for this system could be successfully integrated into and operated within the TEM environment. The sensor prototype had 64 x 128 pixels and a substrate thickness of 30 µm only. The interplay of sensor system and electron radiation could be demonstrated and investigated for the first time, and measurements of the dynamic range properties and imaging performance were conducted. This successful campaign is an important milestone on the way towards operation of the large area devices and a big achievement in challenging project.