Technology at the HLL

The technology department at the semiconductor laboratory turns the ideas of the detector designers into reality. To do this, according to their plans extremely clean silicon wafers polished on both sides. Many process steps are classic methods of microtechnology, but most had to be adapted to our requirements.
The special features of the technology at the HLL are:

  • Maximum purity of all processes to ensure very low leakage currents of the diodes (important for spectroscopic measurements).
  • Extensive control between individual process steps in order to be able to produce very large components with good yield
  • Processing of both sides of the wafer without impairing the other side.

A wafers life


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